Clean room operation instructions

Apr 25, 2019 Leave a message

                                                             Clean room operation instructions


1. When handling the chip, you must wear fiber-free gloves and use a clean, clean tweezers to hold the chip. Do not touch the chip with your fingers or anything else. The contaminated chips must be cleaned before they can be used:




(1) If the front end of any tweezers (ie, holding the chip end) is touched, or the tweezers are dropped, it must be removed. Do not wipe the dirty tweezers with a paper towel or cloth.


(2) Before the next step of the chip cleaning, if it is touched by a finger, it must be cleaned again.


(3) Place the chip on the quartz boat. When it is ready to enter the furnace tube, if the tweezers used are stained or the chip is conspicuously contaminated by the tweezers, the chip must be re-cleaned and replaced with a clean tweezers. .

2. The chip must be placed in the box, covered and stored in the specified position, so as not to expose it.


3. Avoid talking on the chip to prevent saliva from splashing on the chip. Before the chip enters the diffusion furnace, please pay special attention to prevent the above action. If the chip is covered with lint, spray it with a nitrogen gun.


4. From the Teflon boat, the quartz wheel (QuartzBoat) and other carriers, when removing the chip, it must be lifted vertically to avoid scratching the chip. The microscope lens is already off the chip. Remove the chip from the holder.


5. If the oxide layer has been grown on the chip, do not use a diamond knife to engrave it on the chip before sending it to the yellow room.

6. When handling, the hand should never be placed in the sink if you wear gloves.


7. When using a chemical station or oven to process the chip, be sure to place the chip in the Teflon boat. Do not use a plastic box.


8. When placing the chip on the quartz boat, if the chip falls on the ground or in the hand, the chip must be cleaned again before entering the oxidation furnace.


9. Do not touch the inside of the chip case. If it is touched or contaminated with broken chips, it must be cleaned again.


10. Gloves, waste paper and other miscellaneous items should not be left on the console. If the gloves are burnt, worn or have more fiber, they must be replaced.


11. Never open unfamiliar instruments and various on-off valve controls or handles without instructions.

12. Please inform the relevant personnel if the strange taste or abnormal reaction solution, color, sound, etc.


13. When the instrument is damaged due to an operation error, be sure to inform the responsible person or teacher immediately.


14. The chip box must be kept clean and in a clean room and packaged in plastic wrap.


15. Use a ballpoint pen and a dust-free notebook for recording in a clean room. Generally, paper and pencil should not be carried.