ESD Protection requirements for clean rooms
No matter how the external air conditions change, the Cleam Room can maintain the characteristics of cleanliness, temperature, humidity, and pressure as originally set.
The main function of the clean room is to control the cleanliness, temperature and humidity of the atmosphere that products (such as silicon chips, etc.) are in contact with, so that the products can be produced and manufactured in a good environmental space. This space is called "clean room" ".
According to international standards, the level of clean room is mainly based on the number of particles per cubic meter of air whose diameter is larger than the classification standard.
The clean room needs to be set up according to the following requirements:
1. Anti-static floor: point-to-point resistance<10E9Ω; point-to-ground resistance<10E9Ω
2. Anti-static wallboard: point-to-point resistance<10E9Ω; point-to-ground resistance<10E9Ω
3. Anti-static window: point-to-point resistance<10E9Ω; point-to-ground resistance<10E9Ω
4. Reliable grounding system: point-to-point resistance <1Ω
5. Air ionization system: Determine the balance voltage range and de-energizing time according to the process technology. Recommendation: balance voltage <±35V