Is the clean room really clean?
The scope of application of the clean room is very wide, as long as it is of high cleanliness requirements, it will be used, for example, LCD assembly, or some surface cleaning. Clean rooms are divided into many levels according to the degree of cleanliness. At present, most of the clean room levels of semiconductor processing and panel assembly plants are 1000 and 100. The smaller the number, the higher the cleanliness. The concept of 1000 is: per cubic foot Within, the number of dust particles greater than or equal to 0.5 cannot exceed 1000; the concept of level 100 is: within each cubic foot, the number of dust particles greater than or equal to 0.3 cannot exceed 100. Note that the particle size controlled by each level is different.
According to the standard promulgated by the US Federal Government [Federal Atandard (FS) 209E, 1992], clean rooms can be divided into six levels. They are class 1, class 10, class 100, class 1000, class 10,000, and class 100,000. If the level of the clean room is described by the number of dust particles, it can be assumed that the size of the dust particles is not 0.5um, and the level of the clean room should be It is expressed in the order of a specific dust particle size. For example: Level 10 is at 0.2um (dust particle size is 0.2um or more, density is not more than 75/cubic foot), level 1 is 0.1um (dust particle size is 0.1um or more, density is not more than 35 Particles/cubic feet). The cleanliness of the clean room required for integrated circuit manufacturing must be better than class 1000.
The definition of a clean room is a space that controls the distribution of dust, pressure, temperature, humidity, airflow, and speed in the air within a certain range. The dust referred to here refers to dust and particles that are invisible to the naked eye, and refers to dust that cannot be completely removed by ordinary air purifiers. Clean rooms are generally divided into IndustraialCleanRoom (ICR) for electronics and precision industries; and BiologicalCleanRoo (BCR) for pharmaceutical and food industries that need to control the concentration of microorganisms.
The so-called clean room is an artificial environment, and the particles contained in it are far lower than the general environment. With the rapid growth of the number of integrated circuits, the cleanliness requirements of the manufacturing environment (clean room) have also increased. Even if the particle size is smaller than 0.1 microns, it may hinder the operation of the product or reduce its life. The rise of better than nanotechnology has caused the continuous shrinking of key semiconductor dimensions and the continuous increase of integrated circuit integration. Dust particles are more likely to cause chip failure or deterioration of reliability. For example, when metal dust particles fall on the metal wire, it may cause the metal wire to form a short circuit. Also, if dust particles of acidic ionic compounds fall on the metal wires, they may corrode them. Therefore, the clean room is an indispensable element for integrated circuit manufacturing.
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