The elimination of static electricity is necessary to ensure the clean room purification level
Cleanrooms are indispensable in many industries, but they are especially important for the microelectronics industry, where technological upgrading has driven the continuous advancement of cleantech. But the static protection of the clean room is always the top priority. Because all kinds of electrical components produced in the clean room basically need anti-static, because when the products with high performance are produced, if there is electrostatic adsorption, the adsorbed dust will become the breakdown center, and the material will be made. The insulation properties are reduced, etc. Static electricity can be generated at any time on components, equipment, and even on the wall or floor. Electrostatic adsorption is caused by static charge, which leads to a decrease in the cleanliness of the clean room. At the same time, the amount of particles in the air increases after the cleanliness decreases, which further exacerbates the phenomenon of electrostatic adsorption.
Therefore, the clean room should pay attention to the prevention of static electricity while paying attention to pollution control. From the current experience, control from the following three aspects is the most effective and economical.
1. Clean room construction materials need anti-static
When designing and selecting materials, materials that are less prone to static electricity or that generate static electricity can be used. The design of the clean room is not limited to the anti-static floor, and the clean room partition, the wall and the clean structural system are taken into consideration. At present, we also fully consider the anti-static requirements when designing, such as spraying electrostatic coatings, anti-static sprays, etc. as an auxiliary measure or remedy to overcome static electricity. Make the clean room produce no or less static electricity.
2, using the clean room air, temperature and humidity to control
The air humidity is about RH50% or the temperature is about 23 °C, which is a good anti-static environment. Design conditions allow it to be as close as possible to it.
3, eliminate the human body charged
Personnel entering the clean room must wear anti-static clean clothes, wear anti-static gloves, and wear anti-static shoes to eliminate static electricity. Tools such as trolleys in transport turnover, and boxes should also be anti-static products.
Static electricity is not desirable in many cases, and it is extremely dangerous in places with flammable and explosive gases. Although static electricity is less likely to cause fire or explosion in a clean room, the static electricity generated in the clean room is extremely harmful to the electrostatic discharge of the electronic product. Therefore, the control of static electricity in the clean room cannot be ignored.