Electrostatic adsorption of ion fan
In the LCD industry, the glass substrate becomes larger and the ability to attract charges is also enhanced. Due to the large size of the substrate, any contamination may result in a decrease in the yield. Like other pollution control industries, the LCD industry has been looking for new materials that can solve ESD problems. Materials used in cleanrooms are also more likely to use antistatic ion blowers, and new materials can be tried on cotton swabs and rags instead of traditional materials.
The biggest problem with ESD control in a clean room is the movement of people in the clean room. Because people wear a lot of polyester fabrics, they generate a lot of electric charge. The only way to remove this charge in a clean room is to ground.
In the past five years, it has been found that a garment system made of a mixture of carbon fiber and fabric provides clean room requirements for ISO 5 (Class 100).
Each part of the garment has the same electrical conductivity and has an electrically conductive connection from the hood to the sole. Persons working in a clean room can walk through the conductive sole without grounding when wearing such clothes, so that they are not limited by the length of the ground wire.
The emergence of such work clothes is a result of high demands on the product, which helps to reduce the low yield and high bad rate caused by ESD problems in the clean room.
There is no cheap and quick repair method for ESD ion fan control. The key is to control the ESD, such as a suspended laminar flow ion fan, or install an ion fan next to the material that needs to control ESD. As the size of the chip (IC) decreases, it becomes more sensitive to ESD. Now, the control of ESD is not limited to the protection of the working network, but also the control of the wafer and the personnel who produce the wafer. Many companies with high standards are controlling ESD in this way.
