Electrostatic discharge (ESD) effects
1.1 ESD issues
Electrostatic discharge (ESE) is the uncontrolled transfer of charge between two objects of different electrostatic potentials. The most common result of ESD is damage to static sensitive products and equipment failure. In the semiconductor and electronics industries, as well as in the manufacture of medical or optical devices, recording media films, such instances often occur. In order to reduce the loss caused by electrostatic discharge, it is recommended to use an anti-static workbench during operation to ensure production safety.
1.2 ESDs of concern in the industry
In the production of semiconductor electronics, the geometry of the device is getting smaller and smaller in order to meet the needs of miniaturization, higher performance and faster running speed. This results in higher density of the discrete devices on the semiconductor wafer, and ESD events cause device damage or failure through various mechanisms such as melting, metal coating line gasification, thin oxide vias, and the like. ESD events can also degrade the quality of the device, creating a potential defect or "sick operation." Although the device can pass the production test, it will fail prematurely.
The medical, optical, and dielectric thin film industries are also known as "static charges or electrostatic discharges." When a film is deposited on a substrate, an electrostatic event can damage the product at any time.
1.3 Impact of ESD on equipment operation
ESD will not only damage the product, but ESD events will also affect the production equipment of the product. The control functions of many production equipment use microprocessors, and ESD events can also affect the production equipment of the product. The control functions of many production equipment use microprocessors, electromagnetic interference (EMI) radiation effects or conduction effects generated by ESD events that can interfere with the operation of such equipment. The electromagnetic interference generated by an ESD event on one device may affect the operation of nearby devices.
Due to the increasing automation of cleanrooms, their operation is often controlled by a computerized plant management system (FMS). When an ESD event causes a data problem with one device, the entire plant operation is affected. Although machine shutdown is usually not a catastrophic problem, it can result in downtime, reduced processing speed, and sometimes product loss. The inefficiency of the production process increases production costs.